SI(111) YUZASIDA HOSIL QILINGAN ZRSI2 PLYONKASINING YUZA MORFOLOGIYASI
DOI:
https://doi.org/10.65164/ydvv6432Kalit so‘zlar:
ZrSi₂ yupqa plyonkasi, intermetall silitsid fazalar, skanerlovchi elektron mikroskop (SEM), metall–oksid–yarimo‘tkazgich (MOYa), Zr/Si(111) sirtining morfologik evolyutsiyasi.Abstrak
Ushbu tadqiqot doirasida Zr bilan qoplangan Si(111) yarimo‘tkazgich
podloshkaning yuqori harorat vakuum sharoitidagi sirt morfologiyasi o‘rganildi. Eksperimental
sinovlar davomida Zr/Si(111) namunasi yuqori vakuum ostida 950 °C gacha qizdirildi. Ushbu
haroratda qoplama yuzasida sezilarli morfologik o‘zgarishlar kuzatildi, jumladan, mikroyoriqlar va
halqa ko‘rinishidagi strukturalar hosil bo‘lgani aniqlandi.
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